Clean Transfer Robots

Wafer Transfer Robot [Atmospheric Environment]

UT-AFX/W4000 series

High payload model for wafers up to 300mm

Standard model which is available for high payload and extensive movement

Features

ACTRANS UT-AFX/W3000NM

For wafers up to 300mm Standard model

Standard model with power line communication technology

Features

UTX/W-RF5500RW

For wafers up to 300mm Water proof model

Water proof model 
with protection class IP64

Features

UT-AXW3000NS series

For wafers up to 300mm

Vertically articulated SCARA arm robot that contributes to space saving in atmospheric transfer areas

Features

ACTRANS UTM-R3700F

For wafers up to 300mm

Features

ACTRANS UTW-REH5500

For wafers up to 300mm

Features

Wafer Transfer Robot [Vacuum Environment]

UTVW-R2800H

For wafers up to 300mm, payload 2kg

Features

UT-VDX3000NS series

For wafers up to 300mm

High-precision vacuum robot for single arm type equipped with a direct drive motor to significantly reduce vibration

Features

UT-VDW3000HS series

For wafers up to 300mm

High-speed, low vibration double-arm vacuum robot that achieves to a significant improvement in equipment throughput by 650wph of ultra high-speed.

Features

UT-VFX3000NM series

For wafers up to 300mm

Vacuum robot for single arm type that arm length and z stroke is selectable

Features

UT-VSW3000NS series

For wafers up to 300mm

Double-handled vacuum robot with SCARA arm that contributes to space saving in vacuum transfer area

Features

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