We use our in-house plasma evaluation chamber for developing fundamental technologies like pulsing output and frequency tuning, evaluating standalone performance of products, and functional improvements. Besides, through performance evaluation of the entire RF power system such as multi-frequency applications, we are developing high frequency systems that corresponds to the most advanced plasma processes. By conducting plasma evaluation before supplying evaluation machine to our customers, we help in reducing the evaluation period required with customer’s equipment. Through operation verification and reliability verification in the plasma load, we have build a strong know-how of high-frequency circuit design and control methods optimized for the plasma processes, and we are geared to meet various needs of our customers .