UT-AFX/W4000 series
High payload model for wafers up to 300mm
Standard model which is available for high payload and extensive movement
Features
- Integrate servo-amp and adopt wiring-saving by HD-PLC technology
- High payload handling of Max 4kg including hand and hand folder
- As the grip method of wafer, vacuum chuck, edge clamp and Bernoulli’s chuck are available
- Bernoulli’s hand is going to chuck the back side part of the circumference on TAIKO-wafer
Specifications *1
| Model | UT-AFW4010NM | UT-AFW4000NM | |
|---|---|---|---|
| Category | Long Arm Type | High Payload Type | |
| Robot Type | 4axis Cylindrical Coordinate | ||
| Operation Range | X1, X2-axis | 770mm | 500mm |
| θ-axis | 340° | ||
| Z-axis | 300mm or 450mm | ||
| R-axis | – | (182°) | |
| Max. Operation Speed | X1, X2-axis | 1180mm/sec. | 800mm/sec. |
| θ-axis | 200°/sec. | ||
| Z-axis | 250mm/sec. | ||
| R-axis | – | (180°/sec.) | |
| Cycle Time | X1, X2-axis | 1.7sec./770mm | 1.7sec./500mm |
| θ-axis | 2.2sec./340° | ||
| Z-axis | 1.6sec./300mm | 2.2sec./450mm | |
| R-axis | – | (1.7sec./180°) | |
| Repeatability | XYZ±0.1mm | XYZ±0.1mm, R±0.1° | |
| Payload | 1kg/2N·m (*2) | 4kg/8N·m (*2) | |
| Cleanliness | Edge Clamp E/E Type | ISO Class 3 (ISO-14644) | |
| Vacuum E/E Type | ISO Class 1 (ISO-14644) | ||
| Facilities | Air | – | 0.4-0.7MPa, 200L/min |
| Vacuum | -80kPa, 10NL/min | – | |
| Environment | Temperature | 0-40°C | |
| Humidity | 70% or less, No condensation | ||
*1 Transfer perfomance differs from the standard when options are added.
*2 including Hand-folder, Hand and Work