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RF/MW Generators
Clean Transfer Robots
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Products
RF/MW Generators
Clean Transfer Robots
About Us
Contact Us
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RF/MW Generators - Microwave products
2.45GHz/1kW~5kW
Standard type of small size and high efficiency
High-performance type compatible with 2 level pulse
Features
We contribute to the generation of stable high density plasma by high precision output with good reproducibility
Wide lineup from 1kW to 5kW
Supports full support including matching device
Specifications
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