RF/MW Generators - High function type
13.56MHz/500W～5kW
Standard type of small size and high efficiency
High-performance type compatible with 2 level pulse
Features
- Large capacity lineup from 15kW to 30kW
- Supports full support including matching device
- Contribution to system cost reduction by the built-in variable frequency function
27.12MHz/500W～5kW
High-performance type compatible with 2 level pulse
Features
- Compatible with advanced processes such as 3D NAND and FinFET
- Contributing to process development that requires high selectivity and uniformity
- Expanded product lineup to low power areas such as 500W and 1kW
40.68MHz/500W～5kW
High-performance type compatible with 2 level pulse
Features
- Compatible with advanced processes such as 3D NAND and FinFET
- Contributing to process development that requires high selectivity and uniformity
- Expanded product lineup to low power areas such as 500W and 1kW
60MHz/500W～5kW
High-performance type compatible with 2 level pulse
Features
- Compatible with advanced processes such as 3D NAND and FinFET
- Contributing to process development that requires high selectivity and uniformity
- Expanded product lineup to low power areas such as 500W and 1kW