Clean Transfer Robots
FPD Transfer Robot
[for FOPLP]
SPR-AD008BTN-154/034 (ETO products)
Payload 8kg
Double arm robot for FOPLP
Features
- Double arm robot for FOPLP
- Telescopic Z-axis. Stroke : 340mm
SPR-AD008BWN-154/070 (ETO products)
Payload 8kg
Double arm robot for FOPLP
Features
- Double arm robot for FOPLP
- Telescopic Z-axis. Stroke : 700mm
FPD Transfer Robot
[for vacuum environment]
SPR-801R (ETO products)
Payload 3kg
Single arm vacuum robot for Gen 3 panel
Features
- Single arm robot for Gen 2 panel
- Equipped with magnetic fluid seal for high temperature vacuum environment
- SPR-804R model without Z-axis
SPR-804R (ETO products)
Payload 3kg
Single arm vacuum robot with Z-axis for Gen 3 panel
Features
- Single arm robot for Gen 2 panel
- Equipped with magnetic fluid seal for high temperature vacuum environment
- SPR-801R model with Z-axis
SPR-811R (ETO products)
Payload 15kg
Single arm vacuum robot Gen 4.5 panel
Features
- Single arm robot for Gen 4.5 panel
- Equipped with magnetic fluid seal for high temperature vacuum environment
- Similar model : SPR-8565(with Z-axis/double arm)
SPR-8565 (ETO products)
Payload 35kg
Double arm vacuum robot with Z-axis Gen 4.5 panel
Features
- Double arm robot for Gen 4.5 panel
- Equipped with magnetic fluid seal for high temperature vacuum environment
- Similar model : SPR-811R(without Z-axis)
SPR-8566 (ETO products)
Payload 50kg
Double arm vacuum robot with Z-axis Gen 5 panel
Features
- Double arm robot for FOPLP
- Telescopic Z-axis. Stroke : 800mm
SPR-8508R (ETO products)
Payload 70kg
Double arm vacuum robot with Z-axis Gen 5.5 panel
Features
- Double arm robot for Gen 5.5 panel
- Supports the transport of heavy objects such as masks
SPR-8571 (ETO products)
Payload 85kg
Double arm vacuum robot with Z-axis Gen 6 panel
Features
- Double arm robot for Gen 6 panel
- X-axis link arm type model
- Similar model : SPR-8572(X-axis liner slider type) / SPR-8573(X-axis liner slide type/with cooling unit)
SPR-8572 (ETO products)
Payload 85kg
Double arm vacuum robot with Z-axis Gen 6 panel
Features
- Double arm robot for Gen 6 panel
- X-axis liner slider type model
- Similar model : SPR-8571(X-axis link arm type) / SPR-8573(X-axis liner slide type/with cooling unit)
SPR-8573 (ETO products)
Payload 120kg
Double arm vacuum robot with Z-axis Gen 6 panel
Features
- Double arm robot for Gen 6 panel
- Supports high temperature environment with original cooling unit
- Similar model : SPR-8571(X-axis link arm type) / SPR-8572(X-axis liner slide type/without cooling unit)