DAIHEN
Contact Info
DAIHEN
Advanced Component, Inc.

1223 East Arques Avenue,
Sunnyvale, CA 94085 US

Tel: (408) 736-2000
Fax: (408) 736-2010
info@daihen-ac.com
Vacuum Robot

LCD substrates handling robot (for vacuum environment)

< SPR-801S >

801.jpg
Ambient Temperature VAC side: 15 to 70 deg. C
ATM side: 15 to 35 deg. C
Cleanliness ISO Class 4
Configuration 2-axes cylindrical coordinates system
Drooping P to P 4 mm or lees
(at 360 mm from the center of E/E attachment flange)
Mass 35 kg
Operation Range X-axis: 1080 mm
θ-axis: 330 deg.
Operation Speed X-axis: 2.0 sec/1080 mm
θ-axis: 2.0 sec/180 deg.
Payload 3 kg (including E/E)
Repeatability XYZ directions: ±0.2 mm or lees
(at 360 mm from the center of E/E attachment flange)
Trajectory ±2.0 mm or lees
(at 360 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1.3×10-6 Pa

< SPR-804S >

804S.jpg
Ambient Temperature VAC side: 15 to 70 deg. C
ATM side: 15 to 35 deg. C
Cleanliness ISO Class 4
Configuration 3-axes cylindrical coordinates system
Drooping P to P 4 mm or lees
(at 360 mm from the center of E/E attachment flange)
Mass 80 kg
Operation Range X-axis: 1080 mm
θ-axis: 330 deg.
Z-axis: 45 mm
Operation Speed X-axis: 1.8 sec/1080 mm
θ-axis: 1.4 sec/180 deg.
Z-axis: 0.9 sec/45 mm
Payload 3 kg (including E/E)
Repeatability XYZ directions: ±0.2 mm or lees
(at 360 mm from the center of E/E attachment flange)
Trajectory ±2.0 mm or lees
(at 360 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1.3×10-6 Pa

< SPR-8501S >

SPR-8501.jpg
Ambient Temperature VAC side: 15 to 80 deg. C
ATM side: 15 to 35 deg. C
Cleanliness ISO Class 4
Configuration 4-axes cylindrical coordinates system
Drooping P to P 12 mm or less
(at 1800 mm from the center of E/E attachment flange)
Mass 1100 kg
Operation Range X1, X2-axes: 2621.4 mm
θ-axis: 330 deg.
Z-axis: 100 mm
Operation Speed X1, X2-axes: 2.2 sec/2621.4 mm
θ-axis: 2.6 sec/180 deg.
Z-axis: 1.2 s/100 mm
Payload 50 kg/arm (including E/E)
Repeatability XYZ directions: ±0.5 mm or lees
(at 1800 mm from the center of E/E attachment flange)
Trajectory ±8.0 mm or lees
(at 1800 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1.3×10-5 Pa

< SPR-8504 >

SPR-8504.JPG.jpg
Ambient Temperature VAC side: 15 to 80 deg. C
ATM side: 15 to 35 deg. C
Cleanliness ISO Class 4
Configuration 4 axes cylindrical coordinates system
Drooping P to P 32 mm or less
(at 1800 mm from the center of E/E attachment flange)
Mass 3000 kg
Operation Range X1, X2-axes: 3046.7 mm
θ-axis: 330 deg.
Z-axis: 150 mm
Operation Speed X1, X2-axes: 4.0 sec/3046.7 mm
θ-axis: 3.2 sec/180 deg.
Z-axis: 2.3 sec/100mm
Payload 153 kg/arm (including E/E)
Repeatability ±0.5 mm or less
(at 1800 mm from the center of E/E attachment flange)
Trajectory ±16 mm or less
(at 1800 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5G or less)
Withstand Vacuum 1.3x10-6 Pa

< SPR-8109 >

< SPR-8109 >
Ambient Temperature ATM side: 15 to 35 deg. C
VAC side: 15 to 80 deg. C
Cleanliness ISO Class 4
Configuration 3 axes cylindrical coordinates system
Drooping P to P 8.0 mm or less
(at 720 mm from the center of E/E attachement flange)
Mass 900 kg
Operation Range X-axis: 1896 mm
θ-axis: 330 deg.
Z-axis: 100 mm
Operation Speed X-axis: 2.1 sec/1896 mm
θ-axis: 2.7 sec/180 deg.
Z-axis: 1.2 sec/100 mm
Payload 50 kg (including E/E)
Repeatability XYZ directions: ±0.3 mm or less
(at 720 mm from the center of E/E attachment flange)
Trajectory ±5.0 mm or less
(at 720 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1x10-6 Pa

< SPR-8112 >

< SPR-8112 >
Ambient Temperature ATM side: 15 to 35 deg. C
VAC side: 15 to 80 deg. C
Cleanliness ISO Class 4
Configuration 2 axes cylindrical coordinates system
Drooping P to P 32 mm or less
(at 2800 mm from the center of E/E attachement flange)
Mass 1300 kg
Operation Range X-axis: 3291 mm
θ-axis: 330 deg.
Operation Speed X-axis: 3.4 sec/3291 mm
θ-axis: 3.7 sec/180 deg.
Payload 153 kg (including E/E)
Repeatability XYZ directions: ±0.5 mm or less
(at 2800 mm from the center of E/E attachment flange)
Trajectory ±16.0 mm or less
(at 2800 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1.3x10-5 Pa

< SPR-8508 >

< SPR-8508 >
Ambient Temperature ATM side: 15 to 35 deg. C
VAC side: 15 to 70 deg. C
Cleanliness ISO Class 4
Configuration 4 axes cylindrical coordinates system
Drooping P to P 24 mm or less
(at 1500 mm from the center of E/E attachement flange)
Mass 1200 kg
Operation Range X1, X2-axes: 2924 mm
θ-axis: 330 deg.
Z-axis: 150 mm
Operation Speed X1, X2--axes: 3.2 sec/2924 mm
θ-axis: 3.1 sec/180 deg.
Z-axis: 2.6 sec/150 mm
Payload 70 kg /arm (including E/E)
Repeatability XYZ directions: ±0.5 mm or less
(at 1500 mm from the center of E/E attachment flange)
Trajectory ±12.0 mm or less
(at 1500 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1.3x10-5 Pa

< SPR-8522 >

< SPR-8522 >
Ambient Temperature ATM side: 15 to 35 deg. C
VAC side: 15 to 80 deg. C
Cleanliness ISO Class 4
Configuration 4 axes cylindrical coordinates system
Drooping P to P 8 mm or less
(at 2300 mm from the center of E/E attachement flange)
Mass 2350 kg
Operation Range X1, X2-axes: 2522.8 mm
θ-axis: Continuous
Z-axis: 600 mm
Operation Speed X1, X2--axes: 2.6 sec/2522.8 mm
θ-axis: 2.5 sec/180 deg.
Z-axis: 2.0 sec/600 mm
Payload 45 kg/arm (including E/E)
Repeatability XYZ directions: ±0.5 mm or less
(at 2300 mm from the center of E/E attachment flange)
Trajectory ±8.0 mm or less
(at 2300 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1.3x10-5 Pa

< SPR-8524 >

< SPR-8524 >
Ambient Temperature ATM side: 15 to 50 deg. C
VAC side: 15 to 150 deg. C
Cleanliness ISO Class 4
Configuration 4 axes cylindrical coordinates system
Drooping P to P 15 mm or less
(at 3600 mm from the center of E/E attachement flange)
Mass 5000 kg
Operation Range X1, X2-axes: 3860 mm
θ-axis: Continuous
Z-axis: 1045 mm
Operation Speed X1, X2--axes: 3.8 sec/3860 mm
θ-axis: 4.6 sec/180 deg.
Z-axis: 3.3 sec/1045 mm
Payload 300 kg /arm (including E/E)
Repeatability XY directions: ±1.0 mm or less
Z direction: ±0.5 mm or less
(at 3600 mm from the center of E/E attachment flange)
Trajectory ±5.0 mm or less
(at 3600 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1.3x10-5 Pa

< SPR-8534 >

< SPR-8534 >
Ambient Temperature ATM side: 15 to 80 deg. C
VAC side: 20 to 160 deg. C
Cleanliness ISO Class 4
Configuration 4 axes cylindrical coordinates system
Drooping P to P 12 mm or less
(at 3400 mm from the center of E/E attachement flange)
Mass 3800 kg
Operation Range X1, X2-axes: 3650 mm
θ-axis: 340 deg.
Z-axis: 540 mm
Operation Speed X1, X2--axes: 2.4 sec/3650 mm
θ-axis: 2.4 sec/180 deg.
Z-axis: 1.8 sec/540 mm
Payload X1-axis: 120 kg (including E/E)
X2-axis: 180 kg (including E/E)
Repeatability XY directions: ±1.0 mm or less
Z direction: ±0.5 mm or less
(at 3400 mm from the center of E/E attachment flange)
Trajectory ±5.0 mm or less
(at 3400 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1.3x10-5 Pa

< SPR-8535 >

8535_for_website.jpg
Ambient Temperature ATM side: 15 to 80 deg. C
VAC side: 20 to 160 deg. C
Cleanliness ISO Class 4
Configuration 4 axes cylindrical coordinates system
Drooping P to P 10 mm or less
(at 2900 mm from the center of E/E attachement flange)
Mass 2650 kg
Operation Range X1, X2-axes: 3250 mm
θ-axis: 340 deg.
Z-axis: 820 mm
Operation Speed X1, X2--axes: 2.4 sec/3250 mm
θ-axis: 3.1 sec/180 deg.
Z-axis: 2.2 sec/820 mm
Payload X1-axis: 80 kg (including E/E)
X2-axis: 120 kg (including E/E)
Repeatability XY directions: ±1.0 mm or less
Z direction: ±0.5 mm or less
(at 2900 mm from the center of E/E attachment flange)
Trajectory ±5.0 mm or less
(at 2900 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1.3x10-5 Pa

< SPR-8537 >

< SPR-8537 >
Ambient Temperature ATM side: 15 to 80 deg. C
VAC side: 20 to 160 deg. C
Cleanliness ISO Class 4
Configuration 4 axes cylindrical coordinates system
Drooping P to P 10 mm or less
(at 2300 mm from the center of E/E attachement flange)
Mass 2350 kg
Operation Range X1, X2-axes: 2320 mm
θ-axis: 340 deg.
Z-axis: 610 mm
Operation Speed X1, X2--axes: 2.3 sec/2320 mm
θ-axis: 2.5 sec/180 deg.
Z-axis: 1.8 sec/610 mm
Payload X1-axis: 70 kg (including E/E)
X2-axis: 110 kg (including E/E)
Repeatability XY directions: ±1.0 mm or less
Z direction: ±0.5 mm or less
(at 2300 mm from the center of E/E attachment flange)
Trajectory ±5.0 mm or less
(at 2300 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1.3x10-5 Pa

< SPR-8110 >

< SPR-8110 >
Ambient Temperature ATM side: 15 to 35 deg. C
VAC side: 15 to 70 deg. C
Cleanliness ISO Class 4
Configuration 3 axes cylindrical coordinate system
Drooping P to P 6.0 mm or less
(at 500 mm from the center of E/E attachement flange)
Mass 300 kg
Operation Range X-axis: 1500 mm
θ-axis: 330 deg.
Z-axis: 80 mm
Operation Speed X-axis: 3.2 sec/1500 mm
θ-axis: 2.5 sec/180 deg.
Z-axis: 1.8 sec/80 mm
Payload 15 kg (including E/E)
Repeatability XYZ directions: ±0.2 mm or less
(at 500 mm from the center of E/E attachment flange)
Trajectory ±3.0 mm or less
(at 500 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1x10-6 Pa

< SPR-811S >

811S_for_website.jpg
Ambient Temperature ATM side: 15 to 35 deg. C
VAC side: 15 to 70 deg. C
Cleanliness ISO Class 4
Configuration 2 axes cylindrical coordinate system
Drooping P to P 6.0 mm or less
(at 580 mm from the center of E/E attachement flange)
Mass 120 kg
Operation Range X-axis: 1740 mm
θ-axis: 330 deg.
Operation Speed X-axis: 2.4 sec/1740 mm
θ-axis: 2.1 sec/180 deg.
Payload 15 kg (including E/E)
Repeatability XYZ directions: ±0.2 mm or less
(at 580 mm from the center of E/E attachment flange)
Trajectory ±3.0 mm or less
(at 580 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1x10-6 Pa

< SPR-8111 >

< SPR-8111 >
Ambient Temperature ATM side: 15 to 35 deg. C
VAC side: 15 to 80 deg. C
Cleanliness ISO Class 4
Configuration 3 axes cylindrical coordinate system
Drooping P to P 43 mm or less
(at 2800 mm from the center of E/E attachement flange)
Mass 1980 kg
Operation Range X-axis: 2800 mm
θ-axis: Continuous
Z-axis: 400 mm
Operation Speed X-axis: 3.5 sec/2800 mm
θ-axis: 3.0 sec/180 deg.
Z-axis: 4.0 sec/400 mm
Payload 90 kg (including E/E)
Repeatability XYZ directions: ±0.5 mm or less
(at 2800 mm from the center of E/E attachment flange)
Trajectory ±12.0 mm or less
(at 2800 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1.3x10-5 Pa

< SPR-806S >

SPR-806S_for_website.jpg
Ambient Temperature ATM side: 15 to 35 deg. C
VAC side: 15 to 70 deg. C
Cleanliness ISO Class 4
Configuration 2 axes cylindrical coordinate system
Drooping P to P 6.0 mm or less
(at 500 mm from the center of E/E attachement flange)
Mass 110 kg
Operation Range X-axis: 1500 mm
θ-axis: 330 deg.
Operation Speed X-axis: 2.9 sec/1500 mm
θ-axis: 2.6 sec/180 deg.
Payload 10 kg (including E/E)
Repeatability XYZ directions: ±0.3 mm or less
(at 500 mm from the center of E/E attachment flange)
Trajectory ±2.0 mm or less
(at 500 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)
Withstand Vacuum 1x10-6 Pa