DAIHEN
Contact Info
DAIHEN
Advanced Component, Inc.

1223 East Arques Avenue,
Sunnyvale, CA 94085 US

Tel: (408) 736-2000
Fax: (408) 736-2010
info@daihen-ac.com
Vacuum Robot

Daihen's Vacuum Transfer Robot Wafer Transfer.

< UTV-RS2600W Series >

UTV-RS2600W_for_website.jpg
Ambient Temperature ATM side: 0 - 45 deg. C
VAC side: 0 - 80 deg. C
Cleanliness ISO Class 3 (ISO-14644)
Configuration 4 axis cylindrical coordinate system
Mass 75 kg
Operation Range X, A-axis: 440 mm (UTV-RS2600W)
X, A-axis: 545 mm (UTV-RS2620W)
θ-axis: 340 deg.
Z-axis: 35 mm
Operation Speed X, A-axis: 1000 mm/sec.
θ-axis: 216 deg./sec.
Z-axis: 75 mm/sec.
Payload 0.7 kg (including E/E)
Repeatability ±0.2 mm (*1)
Withstand Vacuum 1x10-6 Pa
(*1) Repeatability of 100 cycles operation including the CW and CCW approaches.

< UTV-R2700 Series >

UTV-R2700H_for_website.jpg
Ambient Temperature ATM side: 0 - 40 deg. C
VAC side: 0 - 80 deg. C
Cleanliness ISO Class 3 (ISO-14644)
Configuration 2 axis cylindrical coordinate system (UTV-R2700 Series)
3 axis cylindrical coordinate system (UTV-R2700H Series)
Mass 29 kg (UTV-R2700 Series)
35 kg (UTV-R2700H Series)
Operation Range X-axis: 510 mm (UTV-R2700, UTV-R2700H)
X-axis: 660 mm (UTV-R2730, UTV- R2730H)
X-axis: 720 mm (UTV-R2750, UTV-R2750H)
θ-axis: 340 deg.
Z-aixs: 300 mm (UTV-R2700H Series)
Operation Speed X-axis: 421.9 deg./sec.
θ-axis: 200 deg./sec.
Z-axis: 121 mm/sec. (UTV-R2700H Series)
Payload 0.7 kg (including E/E)
Repeatability ±0.2 mm or less (*1)
Resolution X-axis: 0.060 mm/pulse (UTV-R2700 Series)
X-axis: 0.077 mm/pulse (UTV-R2730, UTV-R2730H)
X-axis: 0.084 mm/pulse (UTV-R2750, UTV-R2750H)
θ-axis: 0.001 deg./pulse
Z-axis: 0.001 mm/pulse (UTV-R2700H Series)
Withstand Vacuum 1x10-6 Pa
(*1) Repeatability of 100 cycles operation including the CW and CCW approaches.