DAIHEN
Contact Info
DAIHEN
Advanced Component, Inc.

1223 East Arques Avenue,
Sunnyvale, CA 94085 US

Tel: (408) 736-2000
Fax: (408) 736-2010
info@daihen-ac.com
Atmospheric Robot

Wafer handling robot (for atmospheric environment)

< UTW-RSH5500 >

ACTRANS_UTW-RSH5500_for_website.jpg
Ambient Temperature 0 - 40 deg. C
Cleanliness ISO Class 3 (ISO-14644)
Configuration 4 axis cylindrical coordinate system
Facilities Requirement Vacuum: -80 kPag or less, 10 NL/min.
Mass 32 kg
Operation Range X, A-axis: 500 mm/(-126 mm)
θ-axis: 340 deg.
Z-axis: 300 mm
Operation Speed X, A-axis: 1800 mm/sec.
θ-axis: 360 deg./sec.
Z-axis: 600 mm/sec.
Payload 0.5 kg/arm (including E/E)
Repeatability ±0.1 mm (*1)
Resolution X, A-axis: 0.0056 mm/pulse or less
θ-axis: 0.001 deg./pulse
Z-axis: 0.001 mm/pulse
(*1) Repeatability of 100 cycles operation including the CW and CCW approaches.

< UTX/W-RF5500 Series >

UTW-RS5500_for_website.jpg
Ambient Temperature 0 to 40 deg. C
Cleanliness ISO Class 3 (ISO-14644)
Configuration 3 axes cylindrical coordinate system (UTX-RF5500)
4 axes cylindrical coordinate system (UTW-RF5500)
Facilities Requirement Vacuum: -80 kPag or less, 10 NL/min.
Mass 27 kg (UTX-RF5500)
32 kg (UTW-RF5500)
Operation Range X, A-axes: 500 mm/(-126 mm)
θ-axis: 340 deg.
Z-axis: 300 mm
Operation Speed X, A-axes: 1000 mm/sec.
θ-axis: 200 deg./sec.
Z-axis: 250 mm/sec.
Payload 0.5 kg/arm (including E/E)
Repeatability ±0.1 mm (*1)
Resolution X, A-axes: 0.0056 mm/pulse
θ-axis: 0.001 deg./pulse
Z-axis: 0.001 mm/pulse
(*1) Repeatability of 100 cycles operation including the CW and CCW approaches.

< EG-303 Series >

EG-303_for_website.jpg
Alignment Accuracy Normal mode:
XY directions: ±0.2 mm
θ direction: ±0.1 deg.
High accuracy mode:
XY directions: ±0.05 mm
θ direction: ±0.075 deg.
Alignment Time Normal mode: 3.5 sec
High acuuracy mode: 7.5 sec
Applicable Wafer φ300 mm
Cleanliness ISO Class 3
Mass 7 kg

< OFH-4100 Series >

OFH-4100_DAC_WEB.jpg
Alignment Accuracy XY directions: ±0.1 mm
θ direction: ±0.2 deg.
Alignment Time 1.8 sec
Applicable Wafer φ100 mm, φ200 mm, φ300 mm
Cleanliness ISO Class 3 (ISO-14644)
Mass 8 kg

< UTM-R3700F >

UTM-R3700F1.png
Ambient Temperature 0 - 40 deg. C
Cleanliness ISO Class 1 (ISO-14644)
Configuration 6 axis articulated system
Facilities Requirement Vacuum: -80 kPag or less, 15 NL/min.
CDA (Optional) : 0.3 - 0.6 MPag, 20 NL/min.
Mass 74 kg
Operation Range X, A-axis: 590 mm
θ-axis: 330 deg.
Z-aixs 310 - 703.8 mm
Y-axis: ±767.5 mm
Operation Speed X, A-axis: 1600 mm/sec.
θ-axis: 540 deg./sec.
Z-axis 1500 mm/sec.
Y-axis: 1500 mm/sec.
Payload 0.5 kg/arm (including E/E)
Repeatability ±0.1 mm
Resolution X, A-axes: 0.001 mm/pulse
θ-axis: 0.001 deg./pulse
Z-axis: 0.001 mm/pulse
Y-axis: 0.001 mm/pulse

< UTC-R800 >

UTC-R800_DAC_HP.jpg
Ambient Temperature 0 - 40 deg. C
Cleanliness ISO Class 3 (ISO-14644)
Configuration 3 axis cylindrical coordinate system
Facilities Requirement Vacuum : -80 kPag ore less, 10 NL/min.
Mass 15kg
Operation Range X-axis: 220 mm
θ-axis: 360 deg.
Z-axis: 170 mm
Operation Speed X-axis: 220 mm/sec.
θ-axis: 150 deg./sec.
Z-axis: 70 mm/sec.
Payload 0.2 kg (Including E/E)
Repeatability ±0.1 mm (*1)
Resolution X-axis: 0.01 mm/pulse
θ-axis: 0.0091 deg./pulse
Z-axis: 0.003 mm/pulse
(*1) Repeatability of 100 cycles operation including the CW and CCW approaches.

< UTX/W-RF6000 Series >

UTW-6000_DAC_WEB.jpg
Ambient Temperature 0 - 40 deg. C
Cleanliness ISO Class 3 (ISO-14644)
Configuration 3 axis cylindrical coordinate system (UTX-RF5500)
4 axis cylindrical coordinate system (UTW-RF5500)
Facilities Requirement Vacuum: -80 kPag or less, 10 NL/min
Mass 20 kg (UTX-RF6000)
25 kg (UTW-RF6000)
Operation Range X-axis: 350 mm
A-axis: 385 mm/(-85 mm)
θ-axis: 340 deg.
Z-axis: 300 mm
Operation Speed X, A-axis: 1000 mm/sec.
θ-axis: 450 deg./sec.
Z-axis: 400 mm/sec.
Payload 0.5 kg/arm (including E/E)
Repeatability ±0.1 mm (*1)
Resolution X, A-axis: 0.0042 mm/pulse
θ-axis: 0.001 deg./pulse
Z-axis: 0.001 mm/pulse
(*1) Repeatability of 100 cycles operation including the CW and CCW approaches.

< UTX/W-RD5700 Series >

UTW-RD5700_2.jpg
Ambient Temperature 0 - 40 deg. C
Cleanliness ISO Class 3 (ISO-14644)
Configuration 3 axes cylindrical coordinate system (UTX-RD5700)
4 axes cylindrical coordinate system (UTW-RD5700)
Facilities Requirement Vacuum: -80 kPag or less, 10 NL/min.
Mass 26 kg (UTX-RD5700)
29 kg (UTW-RD5700)
Operation Range X, A-axes: 500 mm/(-126 mm)
θ-axis: 340 deg.
Z-axis: 300 mm
Operation Speed X, A-axes: 1000 mm/sec.
θ-axis: 200 deg./sec.
Z-axis: 250 mm/sec.
Payload 0.5 kg/arm (including E/E)
Repeatability ±0.1 mm or less (*1)
Resolution X, A-axes: 0.01 mm/pulse
θ-axis: 0.0018 deg./pulse
Z-axis: 0.002 mm/pulse
(*1) Repeatability of 100 cycles operation including the CW and CCW approaches.

< AIGIS OFH-4102i >

OFH-4102i_DAC_WEB.jpg
Alignment Accuracy XY directions: ±0.1 mm
θ direction: ±0.2 deg.
Alignment Time Min. 4.1 sec.
Applicable Wafer φ100 mm, φ150 mm, φ200 mm
Cleanliness ISO Class 3 (ISO-14644)
Mass 8 kg
Min Detectable Defect Sizes 1.0 mm x 0.2 mm (W x D)
AIGIS OFH-4102i detects the gap or burr on the edge part of wafer within the following spec.
Min. detectable gap or burr: 1.0mm x 0.2 mm (W x D)
*AIGIS: Aligner with Gap Inspection System