DAIHEN
Contact Info
DAIHEN
Advanced Component, Inc.

1223 East Arques Avenue,
Sunnyvale, CA 94085 US

Tel: (408) 736-2000
Fax: (408) 736-2010
info@daihen-ac.com
Atmospheric Robot

LCD substrates handling robot (for atmospheric environment)

< SPR-902S >

902.jpg
Ambient Temperature 15 to 35 deg. C
Configuration 3-axes cylindrical coordinates system
Drooping P to P 1.5 mm or less
(at 300 mm from the center of E/E attachement flange)
Mass 35 kg
Operation Range X-axis: 900 mm
θ-axis: 330 deg.
Z-axis: 350 mm
Operation Speed X-axis: 2.1 sec/900 mm
θ-axis: 2.4 sec/330 deg.
Z-axis: 4.2 sec/350 mm
Payload 3 kg/arm (including E/E)
Repeatability XYZ directions: ±0.2 mm or less
(at 300 mm from the center of E/E attachment flange)
Trajectory ±2.0 mm or less
(at 300 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)

< SPR-9518 >

spr-9518-1.jpg
Ambient Temperature 15 to 35 deg. C
Configuration 5 axes cylindrical coordinates system
(Parallel link Z-axis)
Drooping P to P 16 mm or less
(at 860 mm from the center of E/E attachement flange)
Mass 1000 kg
Operation Range X1, X2-axes: 3058 mm
θ-axis: 340 deg.
Z-axis: 2430 mm (Z1: 1215 mm, Z2: 1215 mm)
Operation Speed X1, X2-axes: 2.4 sec/3058 mm
θ-axis: 2.2 sec/180 deg.
Z-axis: 2.8 sec/2430 mm
Payload 50 kg/arm (Including E/E)
Repeatability XY directions: ±0.3 mm or less
Z direction: ±1.0 mm or less
(at 860 mm from the center of E/E attachment flange)
Trajectory ±5.0 mm or less
(at 860 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)

< SPR-9019 >

SPR-9019_for_website.jpg
Ambient Temperature 15 to 35 deg. C
Cleanliness ISO Class 4
Configuration 4 axes cylindrical coordinates system
(Telescopic Z-axis)
Drooping P to P 2.0 mm or less
(at 515 mm from the center of E/E attachement flange)
Mass 230 kg
Operation Range X-axis: 1545 mm
θ-axis: 340 deg.
Z-axis: 800 mm (Z1: 400 mm, Z2: 400 mm)
Operation Speed X-axis: 2.1 sec/1545 mm
θ-axis: 2.2 sec/180 deg.
Z-axis: 3.6 sec/800 mm
Payload 8 kg (including E/E)
Repeatability XYZ directions: ±0.2 mm or less
(at 515 mm from the center of E/E attachment flange)
Trajectory ±2.0 mm or less (at 515 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)

< SPR-906S >

< SPR-906S >
Ambient Temperature 15 to 35 deg. C
Cleanliness ISO Class 4
Configuration 3 axes cylindrical coordinates system
Drooping P to P 1.5 mm or less
(at 400 mm from the center of E/E attachement flange)
Mass 75 kg
Operation Range X-axis: 1200 mm
θ-axis: 340 deg.
Z-axis: 500 mm
Operation Speed X-axis: 2.1 sec/1200 mm
θ-axis: 2.6 sec/180 deg.
Z-axis: 4.4 sec/500 mm
Payload 5 kg (including E/E)
Repeatability XYZ directions: ±0.2 mm or less
(at 400 mm from the center of E/E attachment flange)
Trajectory ±1.5 mm or less
(at 400 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)

< SPR-9519 >

9519.jpg
Ambient Temperature 15 to 35 deg. C
Cleanliness ISO Class 4
Configuration 5 axes cylindrical coordinates system (Telescopic Z-axis)
Drooping P to P 3.0 mm or less
(at 515 mm from the center of E/E attachement flange)
Mass 300 kg
Operation Range X1, X2-axes: 1545 mm
θ-axis: 340 deg.
Z-axis: 800 mm (Z1: 400 mm, Z2: 400 mm)
Operation Speed X1, X2-axes: 2.1 sec/1545 mm
θ-axis: 2.2 sec/180 deg.
Z-axis: 3.6 sec/800 mm
Payload 8 kg /arm (including E/E)
Repeatability XYZ directions: ±0.2 mm or less
(at 515 mm from the center of E/E attachment flange)
Trajectory ±3.0 mm or less
(at 515 mm from the center of E/E attachment flange)
Vibration Resistance 4.9 m/sec2 or less (0.5 G or less)