DAIHEN
Contact Info
DAIHEN
Advanced Component, Inc.

1223 East Arques Avenue,
Sunnyvale, CA 94085 US

Tel: (408) 736-2000
Fax: (408) 736-2010
info@daihen-ac.com
RF Match

DAIHEN's RF Automatic Matching Unit had developped for superior quality plasma generate, such as "Fine Plasma".

RF Automatic Matching Unit <RMN-50 (Matching Box)>

RMN-50_for_DAC.jpg
Cooling Method Water-cooled, forced air-cooled
Dimensions W:410xD:388xH:174 (mm)
Frequency Range 13.56MHz
Mass 15kg
Matching Accuracy Within 1% (power ratio) *1
Matching Speed Within 3 s *1
Max Allowable Power 5000W
*1 Test result using a dummy load and DAIHEN test system

RF Automatic Matching Unit <RMN-200 (Matching Box)>

RMN200.jpg
Cooling Method Water-cooled, forced air-cooled
Dimensions W:500xD:700xH:250 (mm)
Frequency Range 13.56MHz
Mass 35kg
Matching Accuracy Within 1% (power ratio) *1
Matching Speed Within 3 s *1
Max Allowable Power 20kW
*1 Test result using a dummy load and DAIHEN test system

RF Automatic Matching Unit <AMN-50 (Matching Box)> <CMC-10> <ACP-100>

ACP-100FRMN-50B.jpg
Cooling Method Water-cooled, forced air-cooled
Dimensions (AMN-50)W:500×D:640×H:230 (mm)
(CMC-10/ACP-100)W:480×D:110×H:99 (mm)
Frequency Range 60MHz
Mass (AMN-50)26kg
(CMC-10/ACP-100)3kg
Matching Accuracy Within 1% (power ratio) *1
Matching Speed Within 3 s *1
Max Allowable Power 5000W
*1 Test result using a dummy load and DAIHEN test system

RF Automatic Matching Unit <RMN-300 (Matching Box)>

RMN-300.jpg
Cooling Method Water-cooled, forced air-cooled
Dimensions W:500xD:700xH:350 (mm)
Frequency Range 13.56MHz
Mass 50kg
Matching Accuracy Within 1% reflected power (at LCR load)
Matching Speed Within 3 s (at arbitrary position of LCR load)
Max Allowable Power 30kW