DAIHEN's RF Generators had developed for superior quality plasma generate, such as "Fine Plasma".
Cooling Method | Water-cooled, forced air-cooled |
Dimensions | W:430xD:600xH:133 (mm) |
Mass | 48.5kg |
Output Frequency | 60MHz |
Output Frequency Stability | Within ±0.01% |
Output Impedance | 50Ω |
Output Stability | Within ±1% of set power |
Rated Power | 3kW |
Pulse Frequency | 100Hz to 30kHz |
Cooling Method | Water-cooled, forced air-cooled |
Dimensions | W:430xD:600xH:225 (mm) |
Mass | 70kg |
Output Frequency | 60MHz |
Output Frequency Stability | Within ±0.01% |
Output Impedance | 50Ω |
Output Stability | Within ±1% of set power |
Rated Power | 5kW |
Pulse Frequency | 100Hz to 30kHz |
Cooling Method | Water-cooled, forced air-cooled |
Dimensions | W:700xD:1000xH:1310 (mm) |
Mass | 315kg (RGA-150) 380kg (RGA-300) |
Output Frequency | 13.56MHz |
Output Impedance | 50Ω |
Rated Power | 15kW (RGA-150) 30kW (RGA-300) |
Variable Range of Output Frequency | 13MHz to 14MHz |
Cooling Method | Water-cooled, forced air-cooled |
Dimensions | W:420xD:440xH:133 (mm) |
Mass | 37kg |
Output Frequency | 13.56MHz |
Output Frequency Stability | Within ±0.01% |
Output Impedance | 50Ω |
Output Stability | Within ±1% of set power |
Rated Power | 5kW |
Cooling Method | Water-cooled, forced air-cooled |
Dimensions | W:900xD:1000xH:1310 (mm) |
Mass | 450kg |
Output Frequency | 13.56MHz |
Output Impedance | 50Ω |
Rated Power | 40kW |
Variable Range of Output Frequency | 13MHz to 14MHz |
Cooling Method | Water-cooled, forced air-cooled |
Dimensions | W:215xD:540xH:133 (mm) |
Mass | 21.5kg |
Output Frequency | 13.56MHz |
Output Frequency Stability | Within ±0.01% |
Output Impedance | 50Ω |
Output Stability | Within ±1% of set power |
Rated Power | 3kW |