DAIHEN
Contact Info
DAIHEN
Advanced Component, Inc.

1223 East Arques Avenue,
Sunnyvale, CA 94085 US

Tel: (408) 736-2000
Fax: (408) 736-2010
info@daihen-ac.com
RF Generator

DAIHEN's RF Generators had developed for superior quality plasma generate, such as "Fine Plasma".

RF Generator for Plasma Application <AGA-30>

AGA-30-AVANCER_for_DAC.jpg
Cooling Method Water-cooled, forced air-cooled
Dimensions W:430xD:600xH:133 (mm)
Mass 48.5kg
Output Frequency 60MHz
Output Frequency Stability Within ±0.01%
Output Impedance 50Ω
Output Stability Within ±1% of set power
Rated Power 3kW
Pulse Frequency 100Hz to 30kHz
* Stable pulsed output achieved by full digital control.
* Stable and high speed automatic matching is enabled with pulsed output by integrating with our full digital automatic matching unit.
* Excellent product reliability and mass production capability.

RF Generator for Plasma Application <AGA-50>

AGA-50-AVANCER_for_DAC.jpg
Cooling Method Water-cooled, forced air-cooled
Dimensions W:430xD:600xH:225 (mm)
Mass 70kg
Output Frequency 60MHz
Output Frequency Stability Within ±0.01%
Output Impedance 50Ω
Output Stability Within ±1% of set power
Rated Power 5kW
Pulse Frequency 100Hz to 30kHz
* Stable pulsed output achieved by full digital control.
* Stable and high speed automatic matching is enabled with pulsed output by integrating with our full digital automatic matching unit.
* Excellent product reliability and mass production capability.

RF Generator <RGA-150/300>

RGA-300_for_DAC.jpg
Cooling Method Water-cooled, forced air-cooled
Dimensions W:700xD:1000xH:1310 (mm)
Mass 315kg (RGA-150)
380kg (RGA-300)
Output Frequency 13.56MHz
Output Impedance 50Ω
Rated Power 15kW (RGA-150)
30kW (RGA-300)
Variable Range of Output Frequency 13MHz to 14MHz

RF Generator for Plasma Application <RGA-50>

RGA-50-AVANCER_for_DAC.jpg
Cooling Method Water-cooled, forced air-cooled
Dimensions W:420xD:440xH:133 (mm)
Mass 37kg
Output Frequency 13.56MHz
Output Frequency Stability Within ±0.01%
Output Impedance 50Ω
Output Stability Within ±1% of set power
Rated Power 5kW
* Compact Dimensions(65% smaller than our conventional model
* 75% AC-RF Efficiency
* Energy Efficient-(Only 40% of operating power compared to our conventional model)
* Optimized RF Delivery System when used with our automatic matching box.
* Excellent product reliability and mass production capability.

RF Generator <RGA-400>

RGA-400_for_DAC.jpg
Cooling Method Water-cooled, forced air-cooled
Dimensions W:900xD:1000xH:1310 (mm)
Mass 450kg
Output Frequency 13.56MHz
Output Impedance 50Ω
Rated Power 40kW
Variable Range of Output Frequency 13MHz to 14MHz

RF Generator for Plasma Application <RGA-30>

RGA-30-AVANCER_for_DAC.jpg
Cooling Method Water-cooled, forced air-cooled
Dimensions W:215xD:540xH:133 (mm)
Mass 21.5kg
Output Frequency 13.56MHz
Output Frequency Stability Within ±0.01%
Output Impedance 50Ω
Output Stability Within ±1% of set power
Rated Power 3kW
* Compact Dimensions(65% smaller than our conventional model
* 75% AC-RF Efficiency
* Energy Efficient-(Only 40% of operating power compared to our conventional model)
* Optimized RF Delivery System when used with our automatic matching box.
* Excellent product reliability and mass production capability.