DAIHEN
Contact Info
DAIHEN
Advanced Component, Inc.

1223 East Arques Avenue,
Sunnyvale, CA 94085 US

Tel: (408) 736-2000
Fax: (408) 736-2010
info@daihen-ac.com
MW Tuner

DAIHEN's automatic microwave tuning units uses a specially designed computer control, Prediction Correction Algorithm, to improve advanced plasma control.

< SMA-10 (Tuner) > < CMC-10 (Controller) >

SMA-10A_CMC-10A.jpg
Allowed Transient Power 1000 W continuous wave (power ripple: 10% or less)
Dimensions (SMA-10)W:260×D:161×H:277 (mm)
(CMC-10)W:170×D:100×H:40 (mm)
Frequency Range 2450±30MHz
Mass (SMA-10)4.7kg
(CMC-10)0.5kg
Matching Accuracy Within 1% (power ratio) *1
Matching Speed Within 2 s *1
*1 Test result using a dummy load and DAIHEN test system

< SMA-15 (Tuner) > < CMC-10 (Controller) >

SMA-15A_CMC-10A.jpg
Allowed Transient Power 1500 W continuous wave (power ripple: 10% or less)
Dimensions (SMA-15)W:260×D:161×H:277 (mm)
(CMC-10)W:170×D:100×H:40 (mm)
Frequency Range 2450±30MHz
Mass (SMA-15)4.7kg
(CMC-10)0.5kg
Matching Accuracy Within 1% (Power ratio) *1
Matching Speed Within 2 s *1
*1 Test result using a dummy load and DAIHEN test system

< SMA-30 (Tuner) > < CMC-10 (Controller) >

SMA-30D_CMC-10A_2.jpg
Allowed Transient Power 3000 W continuous wave (power ripple: 10% or less)
Cooling Method Water-cooled
Dimensions (SMA-30)W:240×D:161×H:277 (mm)
(CMC-10)W:170×D:100×H:40 (mm)
Frequency Range 2460±30MHz
Mass (SMA-30)5.7kg
(CMC-10)0.5kg
Matching Accuracy Within 1% (Power ratio) *1
Matching Speed Within 2 s *1
*1 Test result using a dummy load and DAIHEN test system

< SMA-50 (Tuner) >

SMA50E.jpg
Allowed Transient Power 5kW
Cooling Method Water
Dimensions W:161×D:260×H:295 (mm)
Frequency Range 2460±30MHz
Mass 8kg
Matching Accuracy Within 1% (power ratio) *1
Matching Speed Within 2s *1
*1 Test result using a dummy load and DAIHEN test system