DAIHEN
Contact Info
DAIHEN
Advanced Component, Inc.

1223 East Arques Avenue,
Sunnyvale, CA 94085 US

Tel: (408) 736-2000
Fax: (408) 736-2010
info@daihen-ac.com
Clean Transfer Robots
daihen
DAIHEN clean robot realized superior repeatabillity with high speed and precise handling in vacuum and atmospheric environment. Also, the robot can handle substarate without particles by optimized smooth motion, and the products reliability are exellent.
DAIHEN
Vacuum
[ Abailable Under Development See Spec ]
ACTSubstrate SizeSingle ArmDual Arm
2axis(X,θ)2axis(X,θ,Z)3axis(X2,θ)
4axis(X2,θ,Z)
Wafer ø200mmSPR-301S SPR-311S
ø300mm SPR-3002 SPR-3003 SPR-3504
ø450mm
FPD 2G SPR-801S SPR-804S
3G SPR-802S
SPR-805S
SPR-807S
3.5G SPR-806S
4G SPR-811S SPR-8106S SPR-8503
5G SPR-8109 SPR-8501S
5.5G SPR-8508
6G SPR-8504
7G
8G SPR-8519
10G-
OLED 2G SPR-8106S
SPR-8109
SPR-8503
3G
3.5GSPR-8508
4G
Atmospheric
[ Abailable See Spec Under Development ]
ACTSubstrate SizeSingle ArmDual Arm
3axis(X,θ,Z)
4axis(X2,θ,Z2)
4axis(X2,θ,Z)
5axis(X2,θ,Z2)
Wafer ø200mm SPR-1502
ø300mmSPR-111S
ø450mm
FPD2G SPR-902S SPR-951S
3GSPR-906S
3.5G
4G SPR-9019 SPR-9519
5G SPR-9517
5.5G SPR-9518
6G
Contact Info
DAIHEN
Advanced Component, Inc.

1223 East Arques Avenue,
Sunnyvale, CA 94085 US

Tel: (408) 736-2000
Fax: (408) 736-2010
info@daihen-ac.com